MICROTECH’s LaserWriter system is designed for defining planar geometries and for surface diagnostics in applications that require maximum resolutions down to 0.5 µm. The system transforms a laser beam into a controlled writing tool for photolithographic mask fabrication or for direct in situ processing on planar substrates. In addition to microlithographic applications, its optical apparatus and substrate motion management are also well-suited for surface inspections and diagnostics. This means the same machine can be used for producing a pattern and for inspecting the results. Such patterns are generated by accurately moving the target (mask or substrate) underneath a focused scanning laser beam with the appropriate wavelength. The system’s performance and costs are optimised for research and development as well as for small-to-medium productions.

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