- Wafer Handling
Fabworx Solutions specialises in designing and manufacturing yield and productivity improvement products for existing semiconductor fab equipment. With a strong focus on wafer handling, the multidisciplinary engineering team excels in robotics and automation. The company’s robot upgrades for mainstream fab equipment have demonstrated remarkable performance improvements, including on-wafer particle reduction, elimination of wafer scratching, increased tool throughput, over four years of maintenance-free operation, and enhanced wafer placement repeatability. The end effectors offered by Fabworx Solutions feature a blade thickness of 0.090 in. for maximum wafer stability, along with replaceable perfluoroelastomer wafer support pads that ensure minimal wafer movement during robot motion.
Fabworx products today are designed as robot upgrades for mainstream fab equipment, and have been able to demonstrate several tool performance improvements including:
On-wafer particle reduction,
Elimination of wafer scratching,
Tool throughput gain,
Greater than four years of operation without maintenance, and
Significant improvement in wafer placement repeatability.
Blade thickness (0.090 in.) offers maximum wafer stability, and provides additional (0.030 in.) clearance for pick motion.
Three replaceable perfluoroelastomer wafer support pads provide exceptional coefficient of static friction, eliminating wafer movement during robot motion.